硅材料;多线切割机;张力控制, 多电机同步控制

The overall structure of multi-wire saw was analyzed and its work principle was explained. The realization diagram of hardware and software was given for control system. Two difficult problems which were tension control and multi-motor synchronization were mainly studied. A electromechanical integration of tension control scheme was designed. Tension was exerted by means of a servo motor instead of a heavy hammer. The real-time position was feedbacked by absolute value encoder of the servo motor. The speed of supply/collect spool motor was adjusted for keepping wire tension stable. The multi-motor control structure was analyzed. A multi-motor synchronization motion model was established. Synchronization motion was achieved by using virtual main axis and model-free adaptive control. Experimental results indicate that multi-motor synchronization control is good and tension control is stable. It shows that the proposed scheme is correct and feasible.