精密球超精密加工技术的研究进展

摘要/Abstract

摘要： 掌握精密球超精密加工过程中的球面研磨轨迹分布特性以及各工艺参数对加工结果的影响，对提高精密球加工精度与效率十分重要。对精密球超精密加工技术的发展及研磨均匀性的评价进行回顾，并根据精密球超精密加工技术的发展脉络，阐述当前主要精密球超精密加工技术的加工原理及加工实例。从材料去除率、加工精度、批一致性等方面对几种精密球超精密加工技术进行比较，并以提高加工精度及加工效率为目标，对精密球超精密加工技术的发展趋势进行预测。

关键词: 精密球, 超精密加工, 研磨均匀性, 研磨轨迹, 批一致性

Abstract: For improving the precision and efficiency of precision ball machining, understanding of the distribution characteristics of the spherical machining trajectory and the influences of each process parameters on the machining results were essential prerequisites. Historical progresses of the ultra-precision machining technology of precision balls and evaluation of lapping uniformity were plotted, and based on the development of precision ball machining methods，the present advanced ultra-precision machining methods of precision balls were described with emphasis on the processing mechanism and examples. The different ultra-precision machining methods of precision balls were compared in terms of material removal rate, machining accuracy and batch consistency. And aiming to high machining accuracy and high efficiency, the probable further trends of ultra-precision machining technology of precision balls were forecasted．

Key words: precision ball, ultra-precision machining, lapping uniformity, lapping trajectory, batch consistency

中图分类号:

TH161

周芬芬1；袁巨龙2；姚蔚峰3；吕冰海2；阮德南4. 精密球超精密加工技术的研究进展[J]. 中国机械工程.

ZHOU Fenfen1；YUAN Julong2；YAO Weifeng3；LYU Binghai2；NGUYEN Duc-Nam4. Review on Ultra-precision Machining Technology of Precision Balls[J]. China Mechanical Engineering.

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http://www.cmemo.org.cn/CN/Y2019/V30/I13/1528

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