介电泳效应磨粒流抛光中的电极形态

doi:10.3969/j.issn.1004-132X.2020.23.006

摘要/Abstract

摘要： 针对薄壁陶瓷工件内表面抛光，提出一种基于介电泳效应的磨粒流抛光方法。将非均匀电场布置于陶瓷工件外表面，极化磨粒，实现陶瓷工件内表面高效抛光。仿真分析发现:电极间隙比为2时，SiC磨粒具有最好的介电泳效应，参与抛光的磨粒最多。陶瓷工件初始内表面粗糙度值Ra为(208±5)nm时，抛光10 h后，无介电泳效应的磨粒流抛光工件内表面粗糙度值Ra为51 nm，有介电泳效应的磨粒流抛光工件内表面粗糙度值Ra为23 nm。

关键词: 磨粒, 介电泳效应, 抛光, 陶瓷, 内表面

Abstract: A method of dielectrophoresis abrasive flow polishing was proposed for internal surface polishing of thin-walled ceramic workpieces. A non-uniform electric field was arranged on outer surfaces of the ceramic workpieces to be polished, and the abrasive particles were polarized to implement efficient polishing of the ceramic workpiece inner surfaces. Simulation results show that when electrode gap ratio is as 2, SiC abrasive particles have the best dielectrophoresis effectiveness and the most abrasive particles involved in polishing. When initial internal surface roughness value of workpiece Ra is as (208±5)nm, after 10 h polishing, the internal surface roughness value Ra of the workpiecess is as 51nm without dielectrophoresis effectiveness, and that of the workpieces is as 23 nm with dielectrophoresis effectiveness.

Key words: abrasive particle, dielectrophoresis, polishing, ceramics, internal surface

中图分类号:

TH161

邓乾发;郑涛;袁巨龙;王旭;张学良;吕冰海. 介电泳效应磨粒流抛光中的电极形态[J]. 中国机械工程, DOI: 10.3969/j.issn.1004-132X.2020.23.006.

DENG Qianfa;ZHENG Tao;YUAN Julong;WANG Xu;ZHANG Xueliang;LYU Binghai. Electrode Morphology in Dielectrophoresis Abrasive Flow Polishing[J]. China Mechanical Engineering, DOI: 10.3969/j.issn.1004-132X.2020.23.006.

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链接本文: http://www.cmemo.org.cn/CN/10.3969/j.issn.1004-132X.2020.23.006

http://www.cmemo.org.cn/CN/Y2020/V31/I23/2822

参考文献

［1］LV Z, HUANG C, ZHU H, et al. A Research on Ultrasonic-assisted Abrasive Waterjet Polishing of Hard-brittle Materials［J］. International Journal of Advanced Manufacturing Technology, 2015, 78(5/8): 1361-1369.

［2］LIU D, ZHU H, HUANG C, et al. Prediction Model of Depth of Penetration for Alumina Ceramics Turned by Abrasive Waterjet—Finite Element Method and Experimental Study［J］. International Journal of Advanced Manufacturing Technology, 2016, 87(9): 2673-2682.

［3］WANG J, MORIDI A, MATHEW P. Micro-grooving on Quartz Crystals by an Abrasive Air Jet［J］. Proceedings of the Institution of Mechanical Engineers Part C — Journal of Mechanical Engineering Science, 2011, 225(C9): 2161-73.

［4］陈逢军, 苗想亮, 唐宇, 等. 磨料液体射流抛光技术研究进展［J］. 中国机械工程, 2015, 26(22): 3116- 3123.

CHEN Fengjun, MIAO Xiangliang, TANG Yu, et al. Research Progresses on Abrasive Fluid Jet Polishing Technology［J］. China Mechanical Engineering, 2015, 26(22):3116-3123.

［5］CHEN F J, WANG H, YIN S H, et al. Cavitation Water-suction Polishing of Metallic Materials under Negative Pressure Effect［J］. Journal of Materials Processing Technology, 2019, 273: 10.

［6］焦可如, 黄树涛, 周丽, 等. CVD金刚石膜抛光技术综述［J］. 中国机械工程, 2011, 22(1):118-126.

JIAO Keru, HUANG Shutao, ZHOU Li, et al. Review of Polishing Technology of CVD Diamond Films［J］. China Mechanical Engineering, 2011, 22(1):118-126.

［7］GAO W, WANG L L, TIAN L F, et al. Novel Abrasive-free Jet Polishing Mechanism for Potassium Dihydrogen Phosphate(KDP) Crystal［J］. Optical Materials Express, 2018, 8(4): 1012-1024.

［8］FU Y Z, GAO H, YAN Q S, et al. A New Predictive Method of the Finished Surface Profile in Abrasive Flow Machining Process［J］.Precision Engineering, 2019, 60: 497-505.

［9］WEI H B, WANG X P, GAO H, et al. A Study on the Influences of Abrasive Media's Viscoelasticity on Entrance Effect in Abrasive Flow Machining［J］.Journal of Manufacturing Science and Engineering, 2019, 141(6): 1-11.

［10］邓乾发,郭晨曦,袁巨龙,等.基于自激振荡脉冲特性的磨粒流抛光不锈钢细管内壁的仿真与实验研究［J］. 表面技术, 2019, 48(10): 363-371.

DENG Qianfa, GUO Chenxi, YUAN Julong, et al. Simulation and Experimental Study on Abrasive Flow Polishing of Stainless Steel Tube Inner Wall Based on the Characteristics of Self-excited Oscillation Pulse［J］. Surface Technology, 2019, 48(10): 363-371.

［11］GAO W, WEI Q L, JI J W, et al. Theoretical Modeling and Analysis of Material Removal Characteristics for KDP Crystal in Abrasive-free Jet Processing［J］. Optics Express, 2019, 27(5): 6268-6282.

［12］IKEDA H, AKAGAMI Y. Highly Efficient Polishing Technology for Glass Substrates Using Tribo-chemical Polishing with Electrically Controlled Slurry［J］. Journal of Manufacturing Processes, 2013, 15(1): 102-107.

［13］AKAGAMI Y, UMEHARA N. Development of Electrically Controlled Polishing with Dispersion Type ER Fluid under AC Electric Field［J］. Wear, 2006, 260(3): 345-350.

［14］ZHAO T, DENG Q, YUAN J, et al. An Experimental Investigation of Flat Polishing with Dielectrophoretic (DEP) Effect of Slurry［J］. The International Journal of Advanced Manufacturing Technology, 2016，53(28): 8211-8216.

［15］赵天晨. 基于介电泳效应的高效超精密抛光理论及实验研究［D］. 杭州：浙江工业大学，2017.

ZHAO Tianchen. Theoretical and Experimental Research on High Efficient on High Efficient Ultra-precision Polishing Method Based on Dielectrophoresis Effect［D］. Hangzhou: Zhejiang University of Technology, 2017.

［16］CHEN F J, WANG H, TANG Y, et al. Novel Cavitation Fluid Jet Polishing Process Based on Negative Pressure Effects［J］. Ultrasonics Sonochemistry, 2018, 42: 339-346.

［17］赵天晨, 袁巨龙, 邓乾发,等. 电极形状对介电泳抛光影响的仿真研究［J］. 华中科技大学学报(自然科学版), 2017, 42(2): 55-60.

ZHAO Tianchen, YUAN Julong, DENG Qianfa, et al. Simulation and Experimental Study on Influence of Electrode Geometry on Dielectrophoresis Polishing［J］. Journal of Huazhong University of Science and Technology (Natural Science Edition), 2017, 42(2): 55-60.

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