石墨烯-聚合物柔性电容传感器制备及性能研究

doi:10.3969/j.issn.1004-132X.2021.24.002

中国机械工程 ›› 2021, Vol. 32 ›› Issue (24): 2909-2914.DOI: 10.3969/j.issn.1004-132X.2021.24.002

石墨烯-聚合物柔性电容传感器制备及性能研究

药芳萍;黎相孟;石强盛杰;张潇

中北大学机械工程学院，太原，030051

出版日期:2021-12-25 发布日期:2022-01-11
通讯作者: 黎相孟（通信作者），男，1985年生，副教授。研究方向为微纳米制造、超精密智能制造。E-mail：xmli123@nuc.edu.cn。
作者简介:药芳萍，女，1994年生，硕士研究生。研究方向为微纳制造、柔性传感器。E-mail：865938976@qq.com。
基金资助:
中国博士后科学基金(2019M663683)；
国家自然科学基金（51705479）

Research on Preparation and Performance of Graphene-Polymer Flexible Capacitance Sensors

YAO Fangping;LI Xiangmeng;SHI Qiangshengjie;ZHANG Xiao

School of Mechanical Engineering,North University of China，Taiyuan，030051

Online:2021-12-25 Published:2022-01-11

摘要/Abstract

摘要： 为了研究不同微结构对柔性电容式压力传感器性能的影响，采用成本较低的旋涂技术制备了无微结构、单层微结构和双层咬合微结构的柔性电容式压力传感器。通过对三种传感器进行测试试验，对比分析了具有不同微结构传感器的灵敏度，同时，对具有单层砂纸微结构传感器的响应特性、重复特性和迟滞特性进行了测试分析。试验结果表明，在20 kPa的载荷下，具有单层砂纸结构的柔性电容式压力传感器相较于其他两种传感器具有较高的灵敏度，在0～4 kPa的压力范围内灵敏度为0.451 kPa-1，4～6 kPa压力范围内灵敏度为0.14 kPa-1,6～25 kPa压力范围内灵敏度为0.03 kPa-1。制备的传感器具有较强的响应特性、良好的恢复性和稳定性，能够适应柔性可穿戴电子器件的应用需求。

关键词: 电容传感器, 柔性, 微结构, 灵敏度

Abstract: In order to study the influences of different microstructures on the performance of flexible capacitive pressure sensors, a low cost spin coating technique was used to prepare flexible capacitor pressure sensors with no microstructure, single layer microstructure, double layer and occlusal microstructure were comparatively analyzed in terms of the sensitivity of sensors. Meanwhile, the response characteristics, repetition characteristics and hysteresis characteristics of the single-layer microstructure sensors were tested and analyzed. The test results reveal that the flexible capacitive pressure sensor with single-layer duplicated sandpaper structure has higher sensitivity than that of the other two sensors, with sensitivity of 0.451 kPa-1 for the pressure range of 0～4 kPa, 0.14 kPa-1for the pressure range of 4～6 kPa and 0.03 kPa-1 for the pressure range of 6～25 kPa, under the load of 20 kPa. The prepared sensors are endowed with high response characteristics, good recovery and stability, and they may adapt to the application requirements in flexible or wearable electronics.

Key words: capacitive sensor, flexibility, microstructure, sensitivity

中图分类号:

TP212

药芳萍, 黎相孟, 石强盛杰, 张潇. 石墨烯-聚合物柔性电容传感器制备及性能研究[J]. 中国机械工程, 2021, 32(24): 2909-2914.

YAO Fangping, LI Xiangmeng, SHI Qiangshengjie, ZHANG Xiao. Research on Preparation and Performance of Graphene-Polymer Flexible Capacitance Sensors[J]. China Mechanical Engineering, 2021, 32(24): 2909-2914.

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http://www.cmemo.org.cn/CN/Y2021/V32/I24/2909

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石墨烯-聚合物柔性电容传感器制备及性能研究

Research on Preparation and Performance of Graphene-Polymer Flexible Capacitance Sensors

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