光纤法珀式SiC耐高温压力传感器的制造与测试

doi:10.3969/j.issn.1004-132X.2022.15.006

摘要/Abstract

摘要： 针对高温环境下压力参数的原位测试需求，基于碳化硅（SiC）材料优异的耐高温特性，研制了一种光纤法珀式全SiC结构耐高温压力传感器。采用超声振动铣磨的加工方法制备了表面粗糙度Ra约11.9 nm的SiC传感膜片。利用SiC晶片氢氟酸辅助直接键合技术，实现SiC传感膜片与SiC基板的高强度气密性键合。搭建了高温压力测试系统，对制备的SiC耐高温压力传感器样机进行了高温环境下的性能测试。结果表明，该传感器能够实现600 ℃高温环境下 0~4 MPa范围内的压力测量；600 ℃下传感器的压力灵敏度达到104.42 nm/MPa，具有较高的线性度，R2＞0.99。

关键词: 压力传感器, 碳化硅, 法珀干涉, 超声加工, 直接键合

Abstract: In order to meet the urgent needs of in-situ pressure detections at high temperatures, a fiber Fabry-Perot SiC high-temperature pressure sensor was fabricated based on the excellent high temperature resistance of SiC materials. A SiC sensor diaphragm with surface roughness Ra about 11.9 nm was fabricated via an ultrasonic vibration mill-grinding(UVMG) method. A direct bonding using SiC wafer hydrofluoric acid was used to realize the high strength air tightness bonding between SiC sensing diaphragm and SiC substrate. The prepared SiC high temperature resistant pressure sensor prototype was tested in high temperature conditions after a high temperature pressure test system was built. Results demonstrate the sensing capabilities for pressures from 0 to 4 MPa at 600 ℃. The pressure sensor illustrates a good linearity(R2>0.99). The pressure sensitivity is measured to be as 104.42 nm/MPa at 600 ℃.

Key words: pressure sensor, silicon carbide(SiC), Fabry-Perot interferometer, ultrasonic machining, direct bonding

中图分类号:

TP212

盛天宇, 李健, 李鸿昌, 蒋永刚. 光纤法珀式SiC耐高温压力传感器的制造与测试[J]. 中国机械工程, 2022, 33(15): 1803-1809.

SHENG Tianyu, LI Jian, LI Hongchang, JIANG Yonggang. Fabrication and Measurement of SiC Fiber-optic Fabry-Perot Pressure Sensors for High-temperature Applications[J]. China Mechanical Engineering, 2022, 33(15): 1803-1809.

导出引用管理器 EndNote|Ris|BibTeX

链接本文: http://www.cmemo.org.cn/CN/10.3969/j.issn.1004-132X.2022.15.006

http://www.cmemo.org.cn/CN/Y2022/V33/I15/1803

参考文献

［1］QIAO X, SHAO Z, BAO W, et al. Fiber Bragg Grating Sensors for the Oil Industry［J］. Sensors, 2017, 17(3)：429.
［2］何文涛, 李艳华, 邹江波, 等. 高温压力传感器的研究现状与发展趋势［J］. 遥测遥控, 2016, 37(6)：61-71.
HE Wentao, LI Yanhua, ZOU Jiangbo, et al. Present Research Status and Prospective Trend of High-temperature Pressure Sensor［J］. Journal of Telemetry, Tracking and Command, 2016, 37(6)：61-71.
［3］蒋庄德, 田边, 赵玉龙, 等. 特种微机电系统压力传感器［J］.机械工程学报, 2013, 49(6):187-197.
JIANG Zhuangde, TIAN Bian, ZHAO Yulong, et al. Special Micro-electro-mechanical Systems Pressure Sensor［J］. Journal of Mechanical Engineering, 2013, 49(6):187-197.
［4］TIAN B, SHANG H, ZHAO L, et al. Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor［J］. Sensors, 2021, 21(2):379.
［5］王权, 丁建宁, 王文襄,等. 通用型高温压阻式压力传感器研究［J］. 中国机械工程, 2005, 16(20):1795-1798.
WANG Quan, DING Jianning, WANG Wenxiang, et al. Research on Generic High Temperature Piezoresistive Pressure Sensor［J］.China Mechanical Engineering, 2005, 16(20):1795-1798.
［6］YAO Z, LIANG T, JIA P, et al. A High-temperature Piezoresistive Pressure Sensor with an Integrated Signal-conditioning Circuit［J］. Sensors, 2016, 16(6):913.
［7］LI C, SUN B, JIA P, et al. Capacitive Pressure Sensor with Integrated Signal-conversion Circuit for High-temperature Applications［J］. IEEE Access, 2020, 8:212787-212793.
［8］MARSI N, MAJLIS B Y, HAMZAH A A, et al. High Reliability of MEMS Packaged Capacitive Pressure Sensor Employing 3C-SiC for High Temperature［J］. Energy Procedia, 2015, 68:471-479.
［9］WU X, JAN C, SOLGAARD O. Single-crystal Silicon Photonic-crystal Fiber-tip Pressure Sensors［J］. Journal of Microelectromechanical Systems, 2015, 24(4)：968-975.
［10］YIN J, LIU T, JIANG J, et al. Batch-producible Fiber-optic Fabry-Perot Sensor for Simultaneous Pressure and Temperature Sensing［J］. IEEE Photonics Technology Letters, 2014, 26(20):2070-2073.
［11］XU J, HE J, HUANG W, et al. Suppression of Parasitic Interference in a Fiber-tip Fabry-Perot Interferometer for High-pressure Measurements［J］. Optics Express, 2018, 26(22):28178-28186.
［12］WANG W, YU Q, LI F, et al. Temperature-insensitive Pressure Sensor Based on All-fused-silica Extrinsic Fabry-Pérot Optical Fiber Interferometer［J］. IEEE Sensors Journal, 2012, 12(7):2425-2429.
［13］YANG S, FENG Z, JIA X, et al. All-sapphire Miniature Optical Fiber Tip Sensor for High Temperature Measurement［J］. Journal of Lightwave and Technology, 2019, 38(7):1988-1997.
［14］YI J. Sapphire Fabry-Perot Pressure Sensor at High Temperature［J］. IEEE Sensors Journal, 2021, 21(2):1596-1602.
［15］LI W, LIANG T, JIA P, et al. Fiber-optic Fabry-Perot Pressure Sensor Based on Sapphire Direct Bonding for High-temperature Applications［J］. Applied Optics, 2019, 58(7):1662-1666.
［16］YAN W, XIE Q, GAO T, et al. Microstructural Evolution of SiC during Melting Process［J］. Modern Physics Letters B, 2013, 27(31):50231.
［17］MARSI N, MAJLIS B Y, HAMZAH A A, et al. High Reliability of MEMS Packaged Capacitive Pressure Sensor Employing 3C-SiC for High Temperature［J］. Energy Procedia, 2015, 68:471-479.
［18］HUANG Y, TANG F, MA D, et al. Design, Fabrication, Characterization, and Application of an Ultra-high Temperature 6H-SiC Sapphire Fiber Optic Vibration Sensor［J］. IEEE Photonics Journal, 2019, 11(5):1-12.
［19］YANG J. A Harsh Environment Wireless Pressure Sensing Solution Utilizing High Temperature Electronics［J］. Sensors, 2013, 13(3):2719-2734.
［20］JIANG Y, LI J, ZHOU Z, et al. Fabrication of All-SiC Fiber-optic Pressure Sensors for High-temperature Applications［J］. Sensors, 2016, 16(10):1660.
［21］李奇思. 碳化硅膜片式光纤高温压力传感器关键制备技术研究［D］.太原：中北大学, 2019.
LI Qisi. Research on Key Preparation Technology of Silicon Carbide Membrane Fiber Optic High Temperature Pressure Sensor［D］. Taiyuan:North University of China, 2019.
［22］CEYSSENS F, DRIESEN M, WOUTERS K, et al. ALow-cost and Highly Integrated Fiber Optical Pressure Sensor System［J］. Sensors and Actuators A:Physical, 2008, 145/146:81-86.
［23］PULLIAM W J, RUSSLER P M, FIELDER R S, et al. High-temperature High-bandwidth Fiber Optic MEMS Pressure-sensor Technology for Turbine-engine Component Testing［C］∥Proceedings of SPIE 4578:Fiber Optic Sensor Technology and Applications. Boston, 2001:229-238.
［24］WANG Z, CHEN J, WEI H, et al. Sapphire Fabry-Perot Interferometer for High-temperature Pressure Sensing［J］. Applied Optics, 2020, 59(17):5189-5196.
［25］LARRUQUERT J I, PREZ-MARN A P, GARCA-CORTS S, et al. Self-consistent Optical Constants of SiC Thin Films［J］. Journal of the Optical Society of America A:Optics Image Science, and Vision, 2011, 28:2340-2345.
［26］LI J, GENG D, ZHANG D, et al. Ultrasonic Vibration Mill-grinding of Single-crystal Silicon Carbide for Pressure Sensor Diaphragms［J］. Ceramics International, 2018, 44(3):3107-3112.
［27］LI J, JIANG Y, LI H, et al. Direct Bonding of Silicon Carbide with Hydrofluoric Acid Treatment for High-temperature Pressure Sensors［J］. Ceramics International, 2020, 46(3):3944-3948.
［28］MARSI N, MAJLIS B Y, HAMZAH A A, et al. Development of High Temperature Resistant of 500°C Employing Silicon Carbide (3C-SiC) Based MEMS Pressure Sensor［J］. Microsystem Technologies, 2015, 21(2):319-330.
［29］SCARDELLETTI M C, ZORMAN C A. Packaged Capacitive Pressure Sensor System for Aircraft Engine Health Monitoring［C］∥Sensors IEEE. Orlando, 2017:20170004122.
［30］FANG X, WU C, GUO X,et al. Development of a 4H-SiC Piezoresistive Pressure Sensor for High Temperature Applications［C］∥2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems. Bangkok, 2019:105-109.
［31］PECHSTEDT R D. Fibre Optic Pressure and Temperature Sensor for Applications in Harsh Environments［C］∥Proceedings of SPIE 8794:5th European Workshop on Optical Fibre Sensors. Cracow, 2013:879405.
［32］WU Y L, SHAO Z Q, WANG W, et al. F-P Interference Optical Fiber Pressure Temperature Composite Sensor Based on Sapphire MEMS Chip［C］∥2nd Symposium on Novel Technology of X-Ray Imaging. Hefei, 2019:110681Q.

[1]	周丹砚, 黄汉雄, 罗杜宇. 双级微结构对柔性压力传感器性能的提升[J]. 中国机械工程, 2023, 34(06): 720-726.
[2]	孙海;李晖;徐忠浩;贾辰强;刘远凝. 螺栓松动边界下纤维增强复合薄板固有特性分析[J]. 中国机械工程, 2020, 31(10): 1213-1218.
[3]	付旻慧1;刘凯2;刘洁1;谭沅良. 碳化硅零件的激光选区烧结及反应烧结工艺[J]. 中国机械工程, 2018, 29(17): 2111-2118.
[4]	陈冰1,2;王各3;刘建明4;邓朝晖1,2;赵清亮5. 圆弧形砂轮精密修整及其声发射在线监测技术[J]. 中国机械工程, 2017, 28(18): 2242-2249.
[5]	刘秀梅1, 2, 徐志锋1, 余欢1. 颗粒尺寸及组合对SLS碳化硅预制体精度的影响[J]. 中国机械工程, 2013, 24(13): 1826-1830.
[6]	石延平, 臧勇, 周庆贵. 基于铁基纳米晶合金薄带的压磁式压力传感器的研究 [J]. 中国机械工程, 2012, 23(5): 547-551.
[7]	郑蓓蓉, 薛伟, 周晨, 张淼. 压力传感器集成恒流源灵敏度温度系数补偿 [J]. 中国机械工程, 2010, 21(7): 800-803.
[8]	康念辉;李圣怡;郑子文;戴一帆;. 化学气相沉积碳化硅平面反射镜的高精度超光滑加工[J]. J4, 2009, 20(01): 0-23,4.
[9]	王晓雷;韩文非;加藤康司;. 碳化硅陶瓷的水润滑特性及其表面微细织构的优化设计[J]. J4, 2008, 19(4): 0-387.
[10]	康念辉;李圣怡;郑子文;戴一帆;. 典型碳化硅光学材料的超光滑抛光试验研究[J]. J4, 2008, 19(21): 0-2645.
[11]	尹韶辉, 陈逢军, 盛晓敏, 大森整, 林伟民, 上原嘉宏. 应用在线电解修整磨削和磁流变光整加工组合工艺进行碳化硅的纳米加工[J]. 中国机械工程, 2007, 18(21): 2547-2550.