The purpose of this study is to develop a vertical scanning system with large-stroke and nanopositioning resolution,in which the coarse positioning was performed by sliding rail, brushless DC motor and precision lead screw,and the fine positioning was performed by parallel board flexure hinge and piezoelectric ceramic.The mechanics analysis and the natural frequency of the parallel board flexure hinge were carried out.

The displacements of the coarse actuator and the fine actuator were measured by the same

laser interference displacement measuring system respectively.The displacement range

of 40mm and positioning resolution of 5nm of the vertical scanning system can be achieved.

vertical scanning system, coarse/fine dual-stage actuator, flexure

hinge, laser interference displacement measuring

研究开发了一种大量程纳米级垂直扫描系统，该系统采用粗/精两级驱动,粗驱动子系统由滑动导轨、直流无刷电机、精密丝杠组成，精驱动子系统由平行平板柔性铰链和压电陶瓷组成。对平行平板柔性铰链进行了力学分析，并推导计算了其固有频率。该垂直扫描系统的粗位移和精位移由同一套激光干涉位移计量系统计量。该垂直扫描系统运动范围为0～40mm，运动分辨率为5nm。

 

垂直扫描系统, 粗/精两级驱动, 柔性铰链, 激光干涉位移计量