A Micro Resonant Accelerometer

Abstract

Abstract:

In order to design and fabricate a micro resonant accelerometer with high sensitivity,based on compliant hinge mechanism and double-ended-tuning-fork(DETF),

the structure of the accelerometer was designed herein.The sensitivity of accelerometer was analyzed via the theoretical method and finite element method (FEM).The parameters of the structure were optimized.The accelerometer was fabricated with micro-electro-mechanical system(MEMS) technology.Based on the principles of detecting,a printed circuit board(PCB) was designed and fabricated.The results of the test show the sensitivity of this accelerometer sample is about 55.03Hz/g,and the resolution is about 182×10^-6g.

Key words: accelerometer, resonator, micro-fabrication, finite element method(FEM)

摘要：

为设计制作高灵敏度、高稳定性的谐振式微加速度计，基于微制作工艺，采用柔性铰链机构和双端固定音叉谐振器设计了微加速度计结构；分别用解析法和有限元方法分析了加速度计的理论灵敏度，同时进行了谐振器结构优化设计；根据检测原理设计制作了测试用电路板，给出了开环谐振频率测试结果以及闭环时加速度测试结果。测试结果表明所设计的谐振式加速度计工作稳定，灵敏度约为55.03Hz/g,分辨力约为182×10^-6g。

关键词:

加速度计, 谐振器, 微制作工艺, 有限元方法

CLC Number:

HE Gao-Fa, TANG Yi-Ke, ZHOU Chuan-De, HE Xiao-Beng, TUN Yang. A Micro Resonant Accelerometer[J]. China Mechanical Engineering, 2010, 21(04): 410-414.

何高法, 唐一科, 周传德, 何晓平, 吴英.

基于柔性铰链机构的谐振式微加速度计设计制作

[J]. 中国机械工程, 2010, 21(04): 410-414.

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