Research Progresses of ELID Mirror Grinding Technology

Abstract

Abstract:

As a low cost and high efficiency ultra-precision mirror processing technology-ELID mirror grinding technology, is widely used in the field of modern ultra-precision machining.This paper summaried the historical development and the present research situation of ELID mirror grinding technology, introduced to the processing mechanism of the technology and the formation of mirror surface,as well as focused on several different forms of the ELID mirror grinding under different conditions. Lastly a prospect of the in-depth research of the technology and some problems of the industrialization promotion were proposed.

Key words:

ELID grinding, mirror grinding, hard and brittle material, nano-grinding, research progress

摘要：

在线电解修整(ELID)镜面磨削技术作为一种低成本高效率的超精密镜面加工技术,广泛应用在现代超精密加工领域中。综述了ELID镜面磨削技术的历史发展和研究现状,介绍了该技术的加工机理和镜面形成过程,重点讨论了在不同条件下几种不同ELID镜面磨削的形式,最后就该技术的深入研究工作作了展望并指出了产业化推广需要解决的问题。

关键词: ELID磨削, 镜面磨削, 硬脆材料, 纳米磨削, 研究进展

CLC Number:

TG58

YIN Shao-Hui, CENG Xian-Liang, FAN Yu-Feng, SHU Yong-Jian, TANG Hun.

Research Progresses of ELID Mirror Grinding Technology

[J]. China Mechanical Engineering, 2010, 21(06): 750-755.

尹韶辉, 曾宪良, 范玉峰, 朱勇建, 唐昆.

ELID镜面磨削加工技术研究进展

[J]. 中国机械工程, 2010, 21(06): 750-755.

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