Parameter Analysis of Hot Plate Based on General Rotary Unitized Design

China Mechanical Engineering ›› 2012, Vol. 23 ›› Issue (4): 411-414.

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Parameter Analysis of Hot Plate Based on General Rotary Unitized Design

Wang Jingzhen1,2;Wei Meng3;Liu Weijun1;Hu Yanbing3

1.Shenyang Institute of Automation,Chinese Academy of Science,Shenyang,110016

2.Graduate University of the Chinese Academy of Sciences,Beijing,100049

3.Shengyang Core Source Microeletronics Equipment Co.,Ltd.,Shenyang,110168

Online:2012-02-25 Published:2012-03-02
Supported by:
National Science and Technology Major Project ( No. 2009ZX02008-003)

基于通用旋转组合设计的热板参数分析

王靖震1,2;魏猛3;刘伟军1;胡延兵3

1.中国科学院沈阳自动化研究所,沈阳,110016

2.中国科学院研究生院,北京,100049

3.沈阳芯源微电子设备有限公司,沈阳,110168

基金资助:
国家科技重大专项(2009ZX02008-003)
National Science and Technology Major Project ( No. 2009ZX02008-003)

Abstract

Abstract:

In lithography process,there is very high requirements to the temperature uniformity of hot plate surface,and for the problem of choosing design parameters,a general rotary

unitized design method was used,the simulation software ANSYS was applied,the data of the temperature uniformities of hot plate surface were obtained when the design parameters were selected for different values.It is consistent between the results of regressive model and the simulation ones.So hot plate parameters can be selected according to this regressive model.

Key words: hot plate, temperature field, regressive model, general rotary unitized design

摘要：

光刻工艺中对热板表面温度场均匀性有极高要求,在热板设计参数选择问题上,通过使用通用旋转组合设计的方法,利用ANSYS仿真模拟软件,得到不同设计参数情况下的热板表面温度场均匀性数据。对仿真结果数据进行回归建模,回归模型计算结果与仿真结果有较高的一致性。结果表明,热板设计参数可以根据该回归模型来选择。

关键词:

热板, 温度场, 回归模型, 通用旋转组合设计

CLC Number:

TH12

WANG Jing-Shen-1, 2, WEI Meng-3, LIU Wei-Jun-1, HU Yan-Bing-3.

Parameter Analysis of Hot Plate Based on General Rotary Unitized Design

[J]. China Mechanical Engineering, 2012, 23(4): 411-414.

王靖震1, 2, 魏猛3, 刘伟军1, 胡延兵3.

基于通用旋转组合设计的热板参数分析

[J]. 中国机械工程, 2012, 23(4): 411-414.

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Parameter Analysis of Hot Plate Based on General Rotary Unitized Design

基于通用旋转组合设计的热板参数分析

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