Abstract:

A variable cross-section beam was used to reduce stress concentration in MEMS structure. A mathematical model of the variable cross-section beam bending could provide reliable theoretical basis to MEMS device processing. As a prerequisite to increase the utilization of space and retain maximum angle and maximum deflection unchanged,the maximum angle dimension stiffness Kφ and the maximum deflection dimension stiffness KW expression were constructed individually. Compared with the dimension stiffness of the original design parameters, the relationship among the dimension stiffness, the beam length and the height of the end face was created clearly, then providing a theoretical support for the design of beam structures in MEMS.

Key words: micro-electro mechanical system(MEMS), variable cross-section beam, maximum angle dimension stiffness, maximum deflection dimension stiffness, mathematical model

摘要：

在MEMS结构中采用变截面梁来减小应力集中的影响。建立的变截面梁弯曲数学模型可为MEMS器件加工工艺提供理论依据。以增加空间利用率且保持最大转角和最大挠度不变为前提条件，分别构建了最大转角尺寸刚度Kφ和最大挠度尺寸刚度KW表达式；对比原设计参数的尺寸刚度，创建了梁长度和端面高度与尺寸刚度的关系式，从而为MEMS结构中梁的设计提供了理论支撑。

关键词: MEMS, 变截面梁, 最大转角尺寸刚度, 最大挠度尺寸刚度, 数学模型