Abstract: Aiming at positions and poses of fiber array which was fixed on six-axis stage, geometric error model was established by homogeneous transformation matrix. A variance sensitivity analysis was adopted to identify important error terms on alignment accuracy according to stage configuration. Based on the results, mapping rules between geometric errors in multi-axis motion stage and alignment accuracy of fiber array were established. This analyzing procedure is reliable from the simulation results, and also may develop the mapping rules easily and conveniently, which will be as the theoretical basis for increasing packaging efficiency and alignment efficiency.

Key words: multi-axis motion stage, fiber alignment accuracy, geometric error, mapping rule;package system

摘要： 针对光缆中阵列光纤与波导芯片精准对接问题，运用光电子封装系统六轴精密运动平台，研究了控制阵列光纤的位姿及对准精度。依据齐次坐标矩阵的几何误差模型，采用方差敏感性分析方法，辨识得出影响对准精度的重要误差项；分析了运动平台的搭建结构，探讨了运动平台几何误差与光纤对准精度的映射规律。实验结果表明，该方法可靠、有效，可为提高光纤封装效率与对准效率提供参考。

关键词: 多轴运动平台, 光纤对准精度, 几何误差, 映射规律, 封装系统