Abstract: Aiming at the problems of non-uniform material removal， a novel processing method was proposed based on functionally graded lapping and polishing plate（FG-LPP）. Taking the Preston equation as the theoretical basis， the numerical simulation and elastic mechanics calculation of the contact stress between the FG-LPP and the workpiece were carried out. The semi-inverse solution method was used to deduce the contact stress equation， a set of the prediction system about two-layer structure mechanics model of the FG-LPP and the workpiece material removal level were established. The material removal rate（MRR） lapping tests of different parts were carried out on ZrO2 ceramics， and the standard deviation of the average MRR was used as the evaluation standard of the uniformity removal in each area. The testing results show that in three time periods of 0~30 min，30~60 min，60~90 min， the standard deviations of the processed FG-LPP are as 6.47 nm/min， 3.76 nm/min， and 5.09 nm/min， while the corresponding values of the common lapping and polishing plate are as 55.23 nm/min， 54.73 nm/min and 35.92 nm/min， respectively. Two types of plates are maintained at a removal rate of 150~400 nm/min， but the FG-LPP may simultaneously achieve uniform removal of materials during the machining processes， reduce the finishing process steps of the workpiece after lapping， and make the machining processes simple and efficient.

Key words: composite, mechanics model, lapping, uniform removal

摘要： 针对材料非均匀去除问题，提出了一种基于梯度功能研抛盘的新颖加工方法。以Preston方程为理论基础，开展了梯度功能研抛盘与工件接触应力的数值模拟和弹性力学计算，通过半逆解法推导接触应力方程，建立了一套关于梯度功能研抛盘的双层结构力学模型与工件材料去除水平的预测体系。在ZrO2陶瓷上进行了不同部位材料去除速率研磨试验，以平均材料去除速率的标准差为各区域均匀性去除的评价标准，试验结果表明，在0~30 min、30~60 min、60~90 min三个时间段，采用梯度功能研抛盘加工后的标准差分别为6.47 nm/min、3.76 nm/min、5.09 nm/min，而普通研抛盘加工后的标准差分别为55.23 nm/min、54.73 nm/min、35.92 nm/min。两种盘均维持在150~400 nm/min的材料去除速率，但梯度功能研抛盘在加工过程中能同时实现材料的均匀去除，减少工件研磨后的修整工序，使加工过程简单高效。

关键词: 复合材料, 力学模型, 研磨, 均匀去除