Abstract:  Ultra-precision machining technology was a key technology in high-end manufacturing fields. At present, ultra-precision machining has entered the nano scale. Mastering the key technology of ultra-precision machining error control, ensuring and improving the machining accuracy of CNC machine tools, become a hot research point to improve the machining and manufacturing levels. This paper systematically summarized the research status and development trend of ultra-precision machining error compensation technology, and focused on the geometric errors, force induced errors, thermal induced errors and their compensation methods, which had the greatest impact on ultra-precision machining. Then, a series of problems of ultra-precision machining in geometric error separation, cutting force, thermal induced error measurement and compensation were deeply discussed, and it is further pointed out that the ultra-precision machining error compensation technology should also pay attention to the development direction of high efficiency, high precision, generalization, modularization, intelligence and flexibility.

Key words: ultra-precision machining, error compensation, research progress, development trend

摘要： 超精密加工技术是高端制造领域的一项关键技术，当前超精密加工已进入纳米尺度，掌握超精密加工误差控制关键技术、保障并提高数控机床的加工精度，已经成为提高加工制造水平的研究热点。系统总结了超精密加工误差补偿技术研究现状及发展趋势，重点介绍了对超精密加工影响最大的几何误差、力诱导误差、热诱导误差及其补偿方法。在此基础上，深入探讨了超精密加工在几何误差分离，切削力、热诱导误差测量与补偿等方面存在的一系列问题，进一步指出超精密加工误差补偿技术还应关注其向高效、高精，通用化，模块化，智能化及柔性化的发展方向。

关键词: 超精密加工, 误差补偿, 研究现状, 发展趋势