Abstract: In order to explore the laws of manufacturing groove structures on Inconel 718 alloy by WJGL, multiple sets of single factor experiments were designed and carried out on the self-developed WJGL equipment. The effects of water jet velocity and laser energy density on the depth, width and burr size of groove structures were analyzed. The experimental results show that the influence of laser energy density on the size of groove structure is higher than that of water jet velocity. Under the condition of constant nozzle aperture, laser energy density and water jet velocity have little effects on the width of groove structures. A nozzle with an aperture of 0.5 mm is used, when the laser power density is as 40 J/cm2 and the water jet velocity is as 60 m/s, the maximum depth of the groove is as 523 μm. When the laser energy density is as 10 J/cm2, the narrowest width of the groove is as 403 μm. When the laser energy density is as 40 J/cm2, the minimum burr size is as 54 μm.According to the theoretical analysis, the mechanism of WJGL technology to remove Inconel 718 alloy material is to ablate the molten material by laser, and then the molten material is washed away by water jet.

Key words: water jet guided laser(WJGL), Inconel 718 alloy, groove structure, laser energy density, water jet velocity

摘要： 为了探究水射流引导激光(WJGL)技术在Inconel 718合金上制造沟槽结构的规律特征，在自行研发的水导激光设备上设计并进行了多组单因素实验，分析了水射流速度和激光能量密度对沟槽结构的深度、宽度以及毛刺尺寸的影响规律。实验结果表明，激光能量密度对沟槽结构尺寸的影响程度要高于水射流速度，在喷嘴孔径固定不变的条件下，激光能量密度和水射流速度对沟槽结构宽度的影响很小。采用孔径为0.5 mm的喷嘴，当水射流速度固定为60 m/s，激光功率密度为40 J/cm2时，获得最大沟槽平均深度为523 μm；当激光能量密度为10 J/cm2时，获得最窄沟槽平均宽度为403 μm；当激光能量密度为40 J/cm2时，获得最小毛刺平均尺寸为54 μm。根据理论分析得出，水导激光技术去除Inconel 718合金的机制是通过激光烧蚀并熔化材料，水射流将熔融物冲刷去除。

关键词: 水射流引导激光, Inconel 718合金, 沟槽结构, 激光能量密度, 水射流速度