Based on the pneumatic path of differential pressure type, this paper introduced the design and working principles of the pneu-pin sensor. To improve the accuracy and sensitivity of pneumatic measurement, the main errors were analyzed, such as fluctuation of working pressure, electrical errors, air quality and nonlinear errors. The corresponding methods were adopted to compensate the errors. The measurement range of pneu-pin sensor is about 55μm, with 0.02μm in resolution and less than 0.25μm in static error. Therefore, pneumatic measurement technology researched herein can provide theoretical and experimental bases for high accuracy, high resolution and non-contact dimensional measurement.