Electrical discharge milling experiments on high resistivity semiconductor silicon were conducted,and processing conditions under three kinds of conduction modes as fixed,rotating,and follow-up were compared.Results show:in fixed conduction mode,as the non-conductive passive film is gradually formed on the electrical conduction spot,contact resistance increases,total resistance in the circuit continues to rise,
discharge peak current decreases,and as a result, the machining process is unable to continue;in rotating conduction mode,as the distance between the inlet-electrode and machining area getting long,bulk resistance in the discharge circuit increases,and consequently discharge peak current gradually decreases;in follow-up moving conduction mode,the inlet-electrode in discharge circuit will continuously clear off the generated passive films and maintain the distance between electrodes,
therefore,contact resistance and bulk resistance remain steady,leading to the good stability of condition in discharge machining.