Using PVDF piezoelectric film and PZT-actuators, combined with a tungsten probe derived from electrochemical grinding, a new scanning stylus with a symmetrical structure of tapping mode was developed. In the stylus, PVDF piezoelectric film as a vibrating beam and the tungsten probe fixed below the middle of the beam were in the state of resonance driven by the PZT. At the same time, PVDF film as a micro-force sensor to probe the atomic force between the top of probe and the surface of sample. A new SPM system was constituted from the constructed probe combined with three-dimensional locator and control procedures etc. This paper described such contents as the composition, working principle, characteristics of the stylus, in addition, the overall structure, measuring principle, three-dimensional positioning table control, signal processing and properties of the whole system test of the SPM system were also described, and three-dimensional image scanning was completed by taking a standard one-dimensional raster as the specimen, and the feasibility and effectiveness of the new SPM system were proved.