In order to solve the difficulties to update the electrolyte and discharge the products in the electrochemical machining(ECM) for deep-small holes, the internal rotary ultrasonic electrolytic composite machining device was constructed,and the comparative experiments of ECM,rotary electrochemical machining(RECM) and RUECM were carried out.The results show that the roundness of holes is improved by the rotation of cathode and the average current is the largest in the RUECM,thus the diameter and the depth of the holes machined by RUECM are the largest, which indicates that the material removal rate (MRR) is the greatest, too. Based on those, the effects of the rotation and vibration of cathode on the flow field and electric field were analyzed by ANSYS CFX with the three-dimensional two-phase flow cavitation model. The simulation results show that when cathode rotates,the air bubbles are gathered on the cathode surfaced,which is not conducive to the discharge of air bubbles; when cathode vibrates,the motion of electrolyte is accelerated,which is conducive to the discharge of air bubbles, therefore,it has the greatest MRR in RUECM,which provides a basis for future researches.