Based on the analysis of current system modeling approaches and tools for manufacturing execution system, an integrated system modeling approach was provided,which was based on system architecture and manufacturing business driven. The approaches and tools of integrated computer aided manufacturing define, business process management, and unified modeling language were integrated. Using this approach, business object model, function model, process model, component model, service model, and service interactive model of manufacturing execution system were constructed. Finally, the proposed modeling approach was applied in the system modeling of a practical project and its feasibility was demonstrated.